机组型号 | 泵型号 | 抽气速率 | 极限压力 | 进气口径 (mm) | 出气口径 (mm) | 电机功率 | 主泵 | 前级泵 | 主泵 | 前级泵 | Ⅰ | Ⅱ | Pa | Torr | Ⅰ | Ⅱ | JZPS150-3 | ZJP-150 | - | 2SK-3 | 150 | 2.7 | 2 | 100 | 50 | 2.2 | - | 7.5 | JZPS150-1 | ZJP-150 | - | 2SK-6A | 150 | 2.7 | 2 | 100 | 50 | 2.2 | - | 11 | JZPS300-3 | ZJP-300 | - | 2SK-6A | 300 | 2.7 | 2 | 150 | 50 | 4 | - | 11 | JZPS150-21 | ZJP-150 | ZJP-70 | 2SK-3 | 150 | 6.7×10-1 | 5×10-1 | 100 | 50 | 2.2 | 1.1 | 7.5 | JZPS300-21 | ZJP-300 | ZJP-150 | 2SK-6A | 300 | 6.7×10-1 | 5×10-1 | 150 | 50 | 4 | 2.2 | 11 | JZPS300-41 | ZJP-300 | ZJP-70 | 2SK-3 | 300 | 6.7×10-1 | 5×10-1 | 150 | 50 | 4 | 1.1 | 7.5 | JZPS600-41 | ZJP-600 | ZJP-150 | 2SK-6A | 600 | 6.7×10-1 | 5×10-1 | 200 | 50 | 7.5 | 2.2 | 11 | JZPS1200-43 | ZJP-1200 | ZJP-300 | 2SK-6A | 1200 | 6.7×10-1 | 5×10-1 | 250 | 50 | 11 | 4 | 11 | JZPY150-3 | ZJP-150 | - | 2YK-3 | 150 | 6.7×10-1 | 5×10-1 | 100 | 50 | 2.2 | - | 7.5 | JZPY300-3 | ZJP-300 | - | 2YK-6 | 300 | 6.7×10-1 | 5×10-1 | 150 | 50 | 4 | - | 11 | JZPY150-21 | ZJP-150 | ZJP-70 | 2YK-3 | 150 | 5×10-3 | 3.8×10-3 | 100 | 50 | 2.2 | 1.1 | 7.5 | JZPY300-21 | ZJP-300 | ZJP-150 | 2YK-6A | 300 | 2.6×10-3 | 2×10-3 | 150 | 50 | 4 | 2.2 | 11 | JZPY300-41 | ZJP-300 | ZJP-70 | 2YK-3 | 300 | 5×10-3 | 3.8×10-3 | 150 | 50 | 4 | 1.1 | 7.5 | JZPY600-41 | ZJP-600 | ZJP-150 | 2YK-6A | 600 | 2.6×10-3 | 2×10-2 | 200 | 50 | 7.5 | 2.2 | 11 | JZPY1200-43 | ZJP-1200 | ZJP-300 | 2YK-6A | 1200 | 2.6×10-3 | 2×10-2 | 250 | 50 | 11 | 4 | 11 | JZPS150-1P | ZJP-150 | - | 2SK-6AP | 150 | 4×10-1 | 3×10-1 | 100 | 50 | 2.2 | - | 11 | |