CCD electric ultra-high vacuum gate valve uses electric device to drive the stem, moving valve disc up and down to make the valve opened or closed. It is used to put through or cut off the airflow in vacuum pipeline. Applicable medium can be pure air and noncorrosive gases. With signal feedback device.
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主要技术性能 Main Technical Performance
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适用范围：Applicability
105～1.3×10-7Pa
阀门漏率：Valve Leak Rate
≤1.3×10-7Pa.L/S.（DN≤200） ≤6.7×10-7Pa.L/S.（DN≥250）
适用温度：Applicable Temperature
-30～ 150℃
阀门开启时阀板两侧的压差： The differential pressure between the two sides of valve disc upon valve opening:
